Novel Method for Electroless Etching of 6H–SiC
نویسندگان
چکیده
منابع مشابه
Electroless etching of Si with IO3– and related species
We have previously derived seven requirements for the formulation of effective stain etchants and have demonstrated that Fe3+, Ce4+, and VO2+ + HF solutions are highly effective at producing nanocrystalline porous silicon. Here, we show that Cl2, Br2, I2, ClO3-, BrO3-, IO3-, I-, and I3- induce etching of silicon when added to HF. However, using the strict definition that a pore is deeper than i...
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ژورنال
عنوان ژورنال: Nanomaterials
سال: 2020
ISSN: 2079-4991
DOI: 10.3390/nano10030538